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Tris(N,N'-di-i-propylforma midinato)lanthanum(III)
La-FMD
Hexachlorodisilane
HCDS
N,N-Disilylsilanamine
TSA
Diiodosilane
DIS
Bis(t-butylamino)silane
BTBAS
Bis(diethylamino)silane
BDEAS(SAM24)
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